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ZEISS Metrology

Equipment Component Inspection

Measure, verify and analyse manufactured equipment components with ZEISS metrology solutions for dimensional inspection, GD&T, CAD comparison, reverse engineering and internal inspection.

Semiconductor-component
Equipment Component Metrology

Verify components against design requirements

Equipment components can require different measurement approaches depending on their geometry, tolerances, materials and inspection requirements.

ZEISS metrology systems provide solutions for dimensional verification, GD&T measurement, first article inspection, surface geometry, CAD comparison and inspection of internal features.

From individual machined components to complex assemblies and legacy parts without usable CAD data, the appropriate measurement technology can help establish whether a component meets its intended requirements.

Inspection Requirements

Different components require different measurement approaches

Equipment component inspection can involve dimensional characteristics, freeform surfaces, assemblies and internal geometry. The inspection method should match the measurement requirement.

01

Dimensional Verification

Check manufactured components against drawings, nominal dimensions, tolerances and defined design requirements using coordinate measuring technology.

02

GD&T and FAI

Measure defined geometric characteristics and support first article inspection workflows where dimensional and geometric requirements need to be documented.

03

CAD Comparison

Compare scanned component geometry against CAD data to identify deviations across surfaces and complex freeform features.

04

Assembly and Alignment

Inspect component relationships, positioning and alignment where multiple features or parts must work together within defined requirements.

05

Legacy Components

Capture the geometry of existing components when original drawings or usable CAD data are unavailable, supporting measurement and reverse-engineering workflows.

06

Internal Features

Inspect internal structures, cavities and other features that may not be accessible with conventional external measurement methods using industrial CT.

Choosing the Right Technology

Match the inspection method to the component

CMMs, optical 3D scanners and industrial CT systems address different measurement requirements. The appropriate solution depends on the component geometry and information that needs to be captured.

CMM Measurement

Coordinate measuring machines are suited to defined dimensional and geometric requirements.

  • Dimensional verification
  • GD&T measurement
  • First article inspection
  • Critical features
  • Drawing-based inspection

3D Scanning

Optical and laser scanning captures component surfaces for geometry analysis and CAD comparison.

  • Freeform geometry
  • Surface deviation
  • CAD comparison
  • Large or complex surfaces
  • Legacy component capture

Industrial CT

Industrial computed tomography can provide access to internal geometry without sectioning the component.

  • Internal structures
  • Hidden features
  • Defect analysis
  • Porosity inspection
  • Internal dimensional analysis
Legacy Equipment Components

From physical component to usable CAD data

Replacement components and legacy equipment parts may exist without current drawings or usable CAD models.

3D scanning can capture the physical geometry of an existing component and provide detailed digital data for further inspection and engineering workflows.

  • Capture existing component geometry
  • Generate inspection-ready 3D data
  • Compare geometry against available CAD
  • Support reverse-engineering workflows
  • Document existing components for future reference
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ZEISS Metrology Solutions

Equipment for component inspection

Depending on the inspection requirement, GTS can provide access to ZEISS measurement technologies for dimensional inspection, 3D scanning and internal component analysis.

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Coordinate Measuring Machine

ZEISS SPECTRUM

A CMM solution for dimensional inspection of manufactured components and defined geometric features.

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ZEISS CONTURA 2
Coordinate Measuring Machine

ZEISS CONTURA

A flexible CMM platform for dimensional verification and inspection of manufactured components.

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3D Laser Scanner

ZEISS T-SCAN hawk 2

A handheld 3D laser scanning solution for capturing component surfaces, geometry and complex features.

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3D Scanner

ZEISS ATOS Q

A 3D scanning solution for capturing component geometry and analysing surface deviations against CAD data.

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Credits: Sebastian Dobrietz
Industrial CT

METROTOM 1

Industrial CT technology for analysing internal structures and features that cannot be accessed through external measurement alone.

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Multisensor Measurement

ZEISS O-INSPECT

A multisensor measurement system combining optical and tactile inspection for components with varied measurement requirements.

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Equipment Component Applications

Inspection across the component lifecycle

Metrology can support equipment components from initial qualification through replacement, troubleshooting and inspection of existing parts.

New Component Qualification

Verify newly manufactured components against drawings, CAD models and specified dimensional requirements.

First Article Inspection

Measure initial production components against defined specifications and document dimensional results.

Precision Machined Components

Inspect machined parts with critical dimensions, tolerances and geometric characteristics.

Complex Freeform Components

Capture and analyse complex surfaces using optical 3D scanning and CAD comparison.

Legacy Equipment Parts

Digitise existing components where drawings or usable CAD data may no longer be available.

Component Assemblies

Examine component relationships, alignment and dimensional characteristics within assemblies.

GTS + ZEISS

Discuss your component inspection requirements

The appropriate metrology solution depends on the component, measurement requirements and information you need from the inspection.

GTS can help you identify an appropriate ZEISS measurement technology for dimensional inspection, 3D scanning, CAD comparison or internal component analysis.

Dimensional inspection
GD&T measurement
First article inspection
CAD comparison
3D scanning
Internal inspection
Let’s Talk Metrology

Have a part you need to measure?

Bring us your measurement challenge. Discuss your component, tolerance requirements and inspection objectives with our metrology specialists.